Stan Stokowski

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Enhanced focusing capability on a sample using a spot matrix
- Patent number 8,194,240
- Issue date Jun 5, 2012
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
System and method for reducing speckle noise in die-to-die inspecti...
- Patent number 7,738,092
- Issue date Jun 15, 2010
- KLA-Tencor Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Methods for detecting and classifying defects on a reticle
- Patent number 7,738,093
- Issue date Jun 15, 2010
- KLA-Tencor Corp.
- David Alles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for reticle inspection and defect review using...
- Patent number 7,379,175
- Issue date May 27, 2008
- KLA-Tencor Technologies Corp.
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Systems for simulating high NA and polarization effects in aerial i...
- Patent number 7,133,119
- Issue date Nov 7, 2006
- KLA-Tencor Technologies Corp.
- Don Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspecting reticles using aerial imaging an...
- Patent number 7,123,356
- Issue date Oct 17, 2006
- KLA-Tencor Technologies Corp.
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspecting reticles using aerial imaging at...
- Patent number 7,027,143
- Issue date Apr 11, 2006
- KLA-Tencor Technologies Corp.
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for simultaneous or sequential multi-perspectiv...
- Patent number 6,922,236
- Issue date Jul 26, 2005
- KLA-Tencor Technologies Corp.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for removing optical abberations during an op...
- Patent number 6,844,927
- Issue date Jan 18, 2005
- KLA-Tencor Technologies Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for detecting phase defects in lithographic masks...
- Patent number 6,727,512
- Issue date Apr 27, 2004
- KLA-Tencor Technologies Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Differential detector coupled with defocus for improved phase defec...
- Patent number 6,646,281
- Issue date Nov 11, 2003
- KLA-Tencor Corporation
- Matthias C. Krantz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR DETECTING AND CLASSIFYING DEFECTS ON A RETICLE
- Publication number 20080304056
- Publication date Dec 11, 2008
- David Alles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for removing optical abberations during an op...
- Publication number 20040100629
- Publication date May 27, 2004
- KLA-Tencor Technologies, Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Application
Method and system for detecting phase defects in lithographic masks...
- Publication number 20040016897
- Publication date Jan 29, 2004
- KLA-Tencor Technologies Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for simultaneous or sequential multi-perspectiv...
- Publication number 20030011760
- Publication date Jan 16, 2003
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING

Stan Stokowski

Person

Patents Grantslast 30 patents

Enhanced focusing capability on a sample using a spot matrix

System and method for reducing speckle noise in die-to-die inspecti...

Methods for detecting and classifying defects on a reticle

Methods and systems for reticle inspection and defect review using...

Systems for simulating high NA and polarization effects in aerial i...

Methods and systems for inspecting reticles using aerial imaging an...

Methods and systems for inspecting reticles using aerial imaging at...

Systems and methods for simultaneous or sequential multi-perspectiv...

Apparatus and methods for removing optical abberations during an op...

Method and system for detecting phase defects in lithographic masks...

Differential detector coupled with defocus for improved phase defec...

Patents Applicationslast 30 patents

METHODS FOR DETECTING AND CLASSIFYING DEFECTS ON A RETICLE

Apparatus and methods for removing optical abberations during an op...

Method and system for detecting phase defects in lithographic masks...

Systems and methods for simultaneous or sequential multi-perspectiv...