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Stanislav Smirnov
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Bethel, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, metrology apparatus, optical system and method
Patent number
11,537,055
Issue date
Dec 27, 2022
ASML Holding N.V.
Stanislav Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam splitting prism systems
Patent number
11,126,007
Issue date
Sep 21, 2021
ASML Holding N.V.
Douglas C. Cappelli
G01 - MEASURING TESTING
Information
Patent Grant
Variable corrector of a wave front
Patent number
10,852,247
Issue date
Dec 1, 2020
ASML Holding N.V.
Stanislav Smirnov
G01 - MEASURING TESTING
Information
Patent Grant
Beam splitting prism systems
Patent number
10,747,010
Issue date
Aug 18, 2020
ASML Holding N.V.
Douglas C. Cappelli
G01 - MEASURING TESTING
Information
Patent Grant
Method and device for focusing in an inspection system
Patent number
10,724,961
Issue date
Jul 28, 2020
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam homogenizer, illumination system and metrology system
Patent number
10,495,889
Issue date
Dec 3, 2019
ASML Netherlands B.V.
Markus Franciscus Antonius Eurlings
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for focusing in an inspection system
Patent number
10,107,761
Issue date
Oct 23, 2018
ASML Netherlands B.V.
Yevgeniy Konstantinovich Shmarev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric illumination system for metrology
Patent number
10,048,591
Issue date
Aug 14, 2018
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatuses for optical pupil symmetrization
Patent number
9,904,173
Issue date
Feb 27, 2018
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection apparatus, lithographic apparatus, and device manufactur...
Patent number
9,285,687
Issue date
Mar 15, 2016
ASML Holding N.V.
Stanislav Y Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric illumination system for metrology
Patent number
9,069,260
Issue date
Jun 30, 2015
ASML Holding N.V.
Stanislav Y. Smirnov
G01 - MEASURING TESTING
Information
Patent Grant
Catadioptric objective for scatterometry
Patent number
8,982,481
Issue date
Mar 17, 2015
ASML Holding N.V.
Stanislav Y. Smirnov
G02 - OPTICS
Information
Patent Grant
Optical system for increasing illumination efficiency of a patterni...
Patent number
8,634,064
Issue date
Jan 21, 2014
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High numerical aperture catadioptric objectives without obscuration...
Patent number
8,259,398
Issue date
Sep 4, 2012
ASML Holding N.V.
Stanislav Y. Smirnov
G02 - OPTICS
Information
Patent Grant
Catadioptric optical system for scatterometry
Patent number
8,107,173
Issue date
Jan 31, 2012
ASML Holding N.V.
Yevgeniy Konstanitinovich Shmarev
G01 - MEASURING TESTING
Information
Patent Grant
High numerical aperture catadioptric objectives without obscuration...
Patent number
8,064,148
Issue date
Nov 22, 2011
ASML Holding N.V.
Stanislav Y. Smirnov
G02 - OPTICS
Information
Patent Grant
Optical system and method for illumination of reflective spatial li...
Patent number
7,965,378
Issue date
Jun 21, 2011
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,859,647
Issue date
Dec 28, 2010
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,852,459
Issue date
Dec 14, 2010
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system for increasing illumination efficiency of a patterni...
Patent number
7,839,487
Issue date
Nov 23, 2010
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Off-axis catadioptric projection optical system for lithography
Patent number
7,834,979
Issue date
Nov 16, 2010
ASML Netherlands B.V.
Stanislav Smirnov
G02 - OPTICS
Information
Patent Grant
Method for improved optical design using deterministically defined...
Patent number
7,826,142
Issue date
Nov 2, 2010
ASML Holding N.V.
Nora-Jean Harned
G02 - OPTICS
Information
Patent Grant
Optical system for increasing illumination efficiency of a patterni...
Patent number
7,777,862
Issue date
Aug 17, 2010
ASML Holding N.V.
Stanislav Y. Smirnov
Information
Patent Grant
Catadioptric optical system for scatterometry
Patent number
7,633,689
Issue date
Dec 15, 2009
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G01 - MEASURING TESTING
Information
Patent Grant
Off-axis catadioptric projection optical system for lithography
Patent number
7,511,798
Issue date
Mar 31, 2009
ASML Holding N.V.
Stanislav Smirnov
G02 - OPTICS
Information
Patent Grant
High numerical aperture projection system and method for microlitho...
Patent number
7,317,583
Issue date
Jan 8, 2008
ASML Holding, N.V.
Mark L Oskotsky
G02 - OPTICS
Information
Patent Grant
Relay lens used in an illumination system of a lithography system
Patent number
7,289,277
Issue date
Oct 30, 2007
ASML Holding N.V.
Lev Ryzhikov
G02 - OPTICS
Information
Patent Grant
Optical system for maskless lithography
Patent number
7,110,082
Issue date
Sep 19, 2006
ASML Holding N.V.
Stanislav Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging apparatus
Patent number
7,023,525
Issue date
Apr 4, 2006
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging apparatus
Patent number
6,778,257
Issue date
Aug 17, 2004
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY APPARATUS, OPTICAL SYSTEM AND METHOD
Publication number
20220179330
Publication date
Jun 9, 2022
ASML Holding N.V.
Stanislav SMIRNOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Beam Splitting Prism Systems
Publication number
20200326556
Publication date
Oct 15, 2020
ASML Holding N.V.
Douglas C. CAPPELLI
G01 - MEASURING TESTING
Information
Patent Application
Beam Splitting Prism Systems
Publication number
20190179162
Publication date
Jun 13, 2019
ASML Holding N.V.
Douglas C. CAPPELLI
G02 - OPTICS
Information
Patent Application
METHOD AND DEVICE FOR FOCUSING IN AN INSPECTION SYSTEM
Publication number
20180067057
Publication date
Mar 8, 2018
ASML Holding N.V.
Yevgeniy Konstantinovich SHMAREV
G01 - MEASURING TESTING
Information
Patent Application
VARIABLE CORRECTOR OF A WAVE FRONT
Publication number
20180045657
Publication date
Feb 15, 2018
ASML Holding N.V.
Stanislav SMIRNOV
G01 - MEASURING TESTING
Information
Patent Application
Beam Homogenizer, Illumination System and Metrology System
Publication number
20170248794
Publication date
Aug 31, 2017
ASML NETHERLANDS B.V.
Markus Franciscus Antonius EURLINGS
G02 - OPTICS
Information
Patent Application
METHOD AND DEVICE FOR FOCUSING IN AN INSPECTION SYSTEM
Publication number
20170191944
Publication date
Jul 6, 2017
ASML Holding N.V.
Yevgeniy Konstantinovich SHMAREV
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatuses for Optical Pupil Symmetrization
Publication number
20160209755
Publication date
Jul 21, 2016
ASML Holding N.V.
Yevgeniy Konstantinovich SHMAREV
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC ILLUMINATION SYSTEM FOR METROLOGY
Publication number
20150116719
Publication date
Apr 30, 2015
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
Catadioptric Objective for Scatterometry
Publication number
20130170049
Publication date
Jul 4, 2013
ASML Holding N.V.
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
Inspection Apparatus, Lithographic Apparatus, and Device Manufactur...
Publication number
20130083306
Publication date
Apr 4, 2013
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High Numerical Aperture Catadioptric Objectives without Obscuration...
Publication number
20120026607
Publication date
Feb 2, 2012
ASML Holding N.V.
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC ILLUMINATION SYSTEM FOR METROLOGY
Publication number
20110310393
Publication date
Dec 22, 2011
ASML Holding N.V.
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
Optical System for Increasing Illumination Efficiency of a Patterni...
Publication number
20100259743
Publication date
Oct 14, 2010
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Catadioptric Optical System for Scatterometry
Publication number
20100046092
Publication date
Feb 25, 2010
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G02 - OPTICS
Information
Patent Application
High Numerical Aperture Catadioptric Objectives Without Obscuration...
Publication number
20090257053
Publication date
Oct 15, 2009
ASML Holding N.V.
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
Off-Axis Catadioptric Projection Optical System for Lithography
Publication number
20090153954
Publication date
Jun 18, 2009
ASML Holding N.V.
Stanislav Smirnov
G02 - OPTICS
Information
Patent Application
Catadioptric Optical System for Scatterometry
Publication number
20090021845
Publication date
Jan 22, 2009
ASML Holding N.V.
Yevgeniy Konstantinovich Shmarev
G02 - OPTICS
Information
Patent Application
Optical system and method for illuimination of reflective spatial l...
Publication number
20080198354
Publication date
Aug 21, 2008
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080186482
Publication date
Aug 7, 2008
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20080137053
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical system for increasing illumination efficiency of a patterni...
Publication number
20070241292
Publication date
Oct 18, 2007
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for improved optical design using deterministically defined...
Publication number
20060245094
Publication date
Nov 2, 2006
ASML Holding N.V.
Nora-Jean Harned
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060138349
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Off-axis catadioptric projection optical system for lithography
Publication number
20060023191
Publication date
Feb 2, 2006
Stanislav Smirnov
G02 - OPTICS
Information
Patent Application
Projection optical system for maskless lithography
Publication number
20040263813
Publication date
Dec 30, 2004
ASML Holding N.V.
Stanislav Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging apparatus
Publication number
20040239909
Publication date
Dec 2, 2004
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Relay lens used in an illumination system of a lithography system
Publication number
20040008408
Publication date
Jan 15, 2004
ASML Holding N.V.
Lev Ryzhikov
G02 - OPTICS
Information
Patent Application
High numerical aperture projection for microlithography
Publication number
20030039028
Publication date
Feb 27, 2003
Mark L. Oskotsky
G02 - OPTICS
Information
Patent Application
Imaging apparatus
Publication number
20030030781
Publication date
Feb 13, 2003
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY