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Stanley Constant Johannes Martinus VAN DEN BERG
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Veldhoven, NL
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last 30 patents
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Patent Grant
Stage positioning system and lithographic apparatus
Patent number
9,897,926
Issue date
Feb 20, 2018
ASML Netherlands B.V.
Wilhelmus Henricus Theodorus Maria Aangenent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
STAGE POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20170010543
Publication date
Jan 12, 2017
ASML NETHERLANDS B.V.
Wilhelmus Henricus Theodorus Maria AANGENENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY