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Stanley Drazkiewicz
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Norwalk, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Mark position measuring apparatus and method, lithographic apparatu...
Patent number
9,551,939
Issue date
Jan 24, 2017
ASML Netherlands B.V.
Simon Gijsbert Josephus Mathijssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for laser beam expansion without expanding spatial coherence
Patent number
7,027,129
Issue date
Apr 11, 2006
ASML Holding N.V.
Alexander Kremer
G02 - OPTICS
Information
Patent Grant
System for laser beam expansion without expanding spatial coherence
Patent number
6,801,299
Issue date
Oct 5, 2004
ASML Holding N.V.
Alexander Kremer
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
MARK POSITION MEASURING APPARATUS AND METHOD, LITHOGRAPHIC APPARATU...
Publication number
20150234290
Publication date
Aug 20, 2015
ASML NETHERLANDS B.V.
Simon Gijsbert Josephus Mathijssen
G01 - MEASURING TESTING
Information
Patent Application
System for laser beam expansion without expanding spatial coherence
Publication number
20050036125
Publication date
Feb 17, 2005
ASML Holding N.V.
Alexander Kremer
G02 - OPTICS
Information
Patent Application
System and method for laser beam expansion without expanding spatia...
Publication number
20040021842
Publication date
Feb 5, 2004
ASML US, Inc.
Alexander Kremer
G02 - OPTICS