Stanley E. Stokowski

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Image acquisition system, image acquisition method, and inspection...
- Patent number 9,886,764
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Apparatus and methods for inspecting extreme ultra violet reticles
- Patent number 9,679,372
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspecting high-resolution photolithography masks
- Patent number 9,619,878
- Issue date Apr 11, 2017
- KLA-Tencor Corporation
- Fred Stanke
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for inspecting extreme ultra violet reticles
- Patent number 8,953,869
- Issue date Feb 10, 2015
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting a reflective lithographic mask...
- Patent number 8,785,082
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Yalin Xiong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection systems and methods for detecting defects on extreme ult...
- Patent number 8,711,346
- Issue date Apr 29, 2014
- KLA-Tencor Corporation
- Stanley E. Stokowski
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for detecting anomalies and/or features of a surface
- Patent number 7,869,023
- Issue date Jan 11, 2011
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Inspection methods and systems for lithographic masks
- Patent number 7,564,545
- Issue date Jul 21, 2009
- KLA-Tencor Technologies Corp.
- Stanley E. Stokowski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus and methods
- Patent number 7,319,229
- Issue date Jan 15, 2008
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G02 - OPTICS
Information Patent Grant
Systems and methods for modifying a reticle's optical properties
- Patent number 7,303,842
- Issue date Dec 4, 2007
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for monitoring a reticle
- Patent number 7,300,729
- Issue date Nov 27, 2007
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for determining and correcting reticle variations
- Patent number 7,300,725
- Issue date Nov 27, 2007
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Systems and methods for mitigating variances on a patterned wafer u...
- Patent number 7,297,453
- Issue date Nov 20, 2007
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System for detecting anomalies and/or features of a surface
- Patent number 7,280,199
- Issue date Oct 9, 2007
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for a wafer inspection system using multiple an...
- Patent number 7,218,392
- Issue date May 15, 2007
- KLA-Tencor Technologies Corporation
- Steve Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 7,119,897
- Issue date Oct 10, 2006
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
System for detecting anomalies and/or features of a surface
- Patent number 7,088,443
- Issue date Aug 8, 2006
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Scanning system for inspecting anomalies on surfaces
- Patent number 7,084,967
- Issue date Aug 1, 2006
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 7,079,238
- Issue date Jul 18, 2006
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 7,064,821
- Issue date Jun 20, 2006
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for a wafer inspection system using multiple an...
- Patent number 6,956,644
- Issue date Oct 18, 2005
- KLA-Tencor Technologies Corporation
- Steve Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 6,891,611
- Issue date May 10, 2005
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Efficient phase defect detection system and method
- Patent number 6,674,522
- Issue date Jan 6, 2004
- KLA-Tencor Technologies Corporation
- Matthias C. Krantz
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 6,657,715
- Issue date Dec 2, 2003
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 6,639,662
- Issue date Oct 28, 2003
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Scanning system for inspecting anamolies on surfaces
- Patent number 6,636,302
- Issue date Oct 21, 2003
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system
- Patent number 6,618,134
- Issue date Sep 9, 2003
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
System for detecting anomalies and/or features of a surface
- Patent number 6,608,676
- Issue date Aug 19, 2003
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for inspection of transparent mask substrates
- Patent number 6,577,389
- Issue date Jun 10, 2003
- KLA-Tencor Technologies Corporation
- Steve Biellak
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGE ACQUISITION SYSTEM, IMAGE ACQUISITION METHOD, AND INSPECTION...
- Publication number 20160048969
- Publication date Feb 18, 2016
- KLA-Tencor Corporation
- Guoheng ZHAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES
- Publication number 20150117754
- Publication date Apr 30, 2015
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTING HIGH-RESOLUTION PHOTOLITHOGRAPHY MASKS
- Publication number 20140307943
- Publication date Oct 16, 2014
- KLA-Tencor Corporation
- Fred Stanke
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES
- Publication number 20130336574
- Publication date Dec 19, 2013
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A REFLECTIVE LITHOGRAPHIC MASK...
- Publication number 20120238096
- Publication date Sep 20, 2012
- KLA-Tencor Corporation
- Yalin Xiong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION SYSTEMS AND METHODS FOR DETECTING DEFECTS ON EXTREME UL...
- Publication number 20110181868
- Publication date Jul 28, 2011
- KLA-Tencor Technologies Corporation
- Stanley E. Stokowski
- B82 - NANO-TECHNOLOGY
Information Patent Application
Inspection methods and systems for lithographic masks
- Publication number 20080226157
- Publication date Sep 18, 2008
- KLA-Tencor Technologies Corporation
- Stanley E. Stokowski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Detecting Surface Characteristics on a Mas...
- Publication number 20080218747
- Publication date Sep 11, 2008
- Stanley E. Stokowski
- G01 - MEASURING TESTING
Information Patent Application
System For Detecting Anomalies And/Or Features of a Surface
- Publication number 20080218762
- Publication date Sep 11, 2008
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR DETECTING ANOMALIES AND/OR FEATURES OF A SURFACE
- Publication number 20080002193
- Publication date Jan 3, 2008
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
System for Detecting Anomalies and/or Features of a Surface
- Publication number 20060256327
- Publication date Nov 16, 2006
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for mitigating variances on a patterned wafer u...
- Publication number 20060240336
- Publication date Oct 26, 2006
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining and correcting reticle variations
- Publication number 20060234145
- Publication date Oct 19, 2006
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Systems and methods for modifying a reticle's optical properties
- Publication number 20060234139
- Publication date Oct 19, 2006
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for monitoring a reticle
- Publication number 20060234144
- Publication date Oct 19, 2006
- KLA-Tencor Technologies Corporation
- Sterling G. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for detecting anomalies and/or features of a surface
- Publication number 20060038984
- Publication date Feb 23, 2006
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for a wafer inspection system using multiple an...
- Publication number 20060007435
- Publication date Jan 12, 2006
- Steve Biellak
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for detecting surface characteristics on a mas...
- Publication number 20050254065
- Publication date Nov 17, 2005
- Stanley E. Stokowski
- G01 - MEASURING TESTING
Information Patent Application
Sample inspection system
- Publication number 20050206886
- Publication date Sep 22, 2005
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Sample inspection system
- Publication number 20050174568
- Publication date Aug 11, 2005
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Illumination apparatus and methods
- Publication number 20050141810
- Publication date Jun 30, 2005
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G02 - OPTICS
Information Patent Application
Sample inspection system
- Publication number 20050134841
- Publication date Jun 23, 2005
- Mehdi Vacz-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Scanning system for inspecting anamolies on surfaces
- Publication number 20050110986
- Publication date May 26, 2005
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
Sample inspection system
- Publication number 20050099621
- Publication date May 12, 2005
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
System for detecting anomalies and / or features of a surface
- Publication number 20050036138
- Publication date Feb 17, 2005
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Scanning system for inspecting anamolies on surfaces
- Publication number 20050036137
- Publication date Feb 17, 2005
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
System for detecting anomalies and/or features of a surface
- Publication number 20040156042
- Publication date Aug 12, 2004
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Sample inspection system
- Publication number 20040057045
- Publication date Mar 25, 2004
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Scanning system for inspecting anamolies on surfaces
- Publication number 20040057044
- Publication date Mar 25, 2004
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING

Stanley E. Stokowski

Person

Patents Grantslast 30 patents

Image acquisition system, image acquisition method, and inspection...

Apparatus and methods for inspecting extreme ultra violet reticles

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Inspecting high-resolution photolithography masks

Apparatus and methods for inspecting extreme ultra violet reticles

Method and apparatus for inspecting a reflective lithographic mask...

Inspection systems and methods for detecting defects on extreme ult...

System for detecting anomalies and/or features of a surface

Inspection methods and systems for lithographic masks

Illumination apparatus and methods

Systems and methods for modifying a reticle's optical properties

Method for monitoring a reticle

Method for determining and correcting reticle variations

Systems and methods for mitigating variances on a patterned wafer u...

System for detecting anomalies and/or features of a surface

Systems and methods for a wafer inspection system using multiple an...

Sample inspection system

System for detecting anomalies and/or features of a surface

Scanning system for inspecting anomalies on surfaces

Sample inspection system

Sample inspection system

Systems and methods for a wafer inspection system using multiple an...

Sample inspection system

Efficient phase defect detection system and method

Sample inspection system

Sample inspection system

Scanning system for inspecting anamolies on surfaces

Sample inspection system

System for detecting anomalies and/or features of a surface

System and methods for inspection of transparent mask substrates

Patents Applicationslast 30 patents

IMAGE ACQUISITION SYSTEM, IMAGE ACQUISITION METHOD, AND INSPECTION...

IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING

APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES

INSPECTING HIGH-RESOLUTION PHOTOLITHOGRAPHY MASKS

APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES

METHOD AND APPARATUS FOR INSPECTING A REFLECTIVE LITHOGRAPHIC MASK...

INSPECTION SYSTEMS AND METHODS FOR DETECTING DEFECTS ON EXTREME UL...

Inspection methods and systems for lithographic masks

Method and Apparatus for Detecting Surface Characteristics on a Mas...

System For Detecting Anomalies And/Or Features of a Surface

SYSTEM FOR DETECTING ANOMALIES AND/OR FEATURES OF A SURFACE

System for Detecting Anomalies and/or Features of a Surface

Systems and methods for mitigating variances on a patterned wafer u...

Method for determining and correcting reticle variations

Systems and methods for modifying a reticle's optical properties

Method for monitoring a reticle

System for detecting anomalies and/or features of a surface

Systems and methods for a wafer inspection system using multiple an...

Method and apparatus for detecting surface characteristics on a mas...

Sample inspection system

Sample inspection system

Illumination apparatus and methods

Sample inspection system

Scanning system for inspecting anamolies on surfaces

Sample inspection system

System for detecting anomalies and / or features of a surface

Scanning system for inspecting anamolies on surfaces

System for detecting anomalies and/or features of a surface

Sample inspection system

Scanning system for inspecting anamolies on surfaces