Stanley W. Stone

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Gloucester, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck shielding mechanism
- Patent number 9,611,540
- Issue date Apr 4, 2017
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-vacuum high speed pre-chill and post-heat stations
- Patent number 9,236,216
- Issue date Jan 12, 2016
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS
- Publication number 20140034846
- Publication date Feb 6, 2014
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SHIELDING MECHANISM
- Publication number 20100159153
- Publication date Jun 24, 2010
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Auto-calibration method and device for wafer handler robots
- Publication number 20050228542
- Publication date Oct 13, 2005
- Varian Semiconductor Equipment Associates, Inc.
- Stanley W. Stone
- H01 - BASIC ELECTRIC ELEMENTS