Stefan Burkhart

Follow

Person

Heidenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Irradiation with high energy ions for surface structuring and treat...
- Patent number 8,466,047
- Issue date Jun 18, 2013
- Carl Zeiss SMT GmbH
- Martin Weiser
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IRRADIATION WITH HIGH ENERGY IONS FOR SURFACE STRUCTURING AND TREAT...
- Publication number 20120206795
- Publication date Aug 16, 2012
- Martin WEISER
- G02 - OPTICS