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Stefan Carolus Jacobus Antonius Keij
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Breda, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method using overla...
Patent number
8,264,686
Issue date
Sep 11, 2012
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate used in a method and apparatus for angular-resolved spect...
Patent number
8,064,056
Issue date
Nov 22, 2011
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,898,662
Issue date
Mar 1, 2011
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,692,792
Issue date
Apr 6, 2010
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,564,555
Issue date
Jul 21, 2009
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method using overla...
Patent number
7,532,305
Issue date
May 12, 2009
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, alignment system, and device manufacturing...
Patent number
7,440,079
Issue date
Oct 21, 2008
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method using overla...
Patent number
7,391,513
Issue date
Jun 24, 2008
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Inspection Apparatus and Method, Lithographic Apparatus, Lithograph...
Publication number
20120206703
Publication date
Aug 16, 2012
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Substrate Used in a Method and Apparatus for Angular-Resolved Spect...
Publication number
20110122496
Publication date
May 26, 2011
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method Using Overla...
Publication number
20090244538
Publication date
Oct 1, 2009
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Method and Apparatus, Lithographic Apparatus, Metrology A...
Publication number
20090097008
Publication date
Apr 16, 2009
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20080043239
Publication date
Feb 21, 2008
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20080036984
Publication date
Feb 14, 2008
ASML NETHERLANDS B.V.
Everhardus Cornelis Mos
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20070296973
Publication date
Dec 27, 2007
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus, alignment system, and device manufacturing...
Publication number
20060061743
Publication date
Mar 23, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY