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Stefan CASEY

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  • Clifton Park, NY, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas delivery system for an ion source
    • Patent number 8,003,954
    • Issue date Aug 23, 2011
    • Varian Semiconductor Equipment Associates, Inc.
    • John Slocum
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS DELIVERY SYSTEM FOR AN ION SOURCE
    • Publication number 20090289197
    • Publication date Nov 26, 2009
    • Varian Semiconductor Equipment Associates, Inc.
    • John SLOCUM
    • H01 - BASIC ELECTRIC ELEMENTS