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Stefan CASEY
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Clifton Park, NY, US
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last 30 patents
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Patent Grant
Gas delivery system for an ion source
Patent number
8,003,954
Issue date
Aug 23, 2011
Varian Semiconductor Equipment Associates, Inc.
John Slocum
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
GAS DELIVERY SYSTEM FOR AN ION SOURCE
Publication number
20090289197
Publication date
Nov 26, 2009
Varian Semiconductor Equipment Associates, Inc.
John SLOCUM
H01 - BASIC ELECTRIC ELEMENTS