Stefan CASEY

Person

  • Clifton Park, NY, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Gas delivery system for an ion source

    • Patent number 8,003,954
    • Issue date Aug 23, 2011
    • Varian Semiconductor Equipment Associates, Inc.
    • John Slocum
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS DELIVERY SYSTEM FOR AN ION SOURCE

    • Publication number 20090289197
    • Publication date Nov 26, 2009
    • Varian Semiconductor Equipment Associates, Inc.
    • John SLOCUM
    • H01 - BASIC ELECTRIC ELEMENTS