Stefan Cernusca

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Patents Grantslast 30 patents

Information Patent Grant
Charged-particle exposure apparatus with electrostatic zone plate
- Patent number 8,304,749
- Issue date Nov 6, 2012
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Global point spreading function in multi-beam patterning
- Patent number 8,278,635
- Issue date Oct 2, 2012
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Compensation of dose inhomogeneity and image distortion
- Patent number 8,258,488
- Issue date Sep 4, 2012
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle exposure apparatus
- Patent number 7,737,422
- Issue date Jun 15, 2010
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced pattern definition for particle-beam processing
- Patent number 7,276,714
- Issue date Oct 2, 2007
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Global Point Spreading Function in Multi-Beam Patterning
- Publication number 20100224790
- Publication date Sep 9, 2010
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
COMPENSATION OF DOSE INHOMOGENEITY AND IMAGE DISTORTION
- Publication number 20100038554
- Publication date Feb 18, 2010
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged-Particle Exposure Apparatus
- Publication number 20080258084
- Publication date Oct 23, 2008
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Advanced pattern definition for particle-beam processing
- Publication number 20050242302
- Publication date Nov 3, 2005
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY