Stefan Cornelis Theodorus Van Der Sanden

Person

Nijmegen, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,782,349
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,592,753
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method and lithographic apparatus
- Patent number 11,493,851
- Issue date Nov 8, 2022
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,327,407
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method and lithographic apparatus
- Patent number 11,156,923
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 11,003,099
- Issue date May 11, 2021
- ASML Netherlands B.V.
- Maurits Van Der Schaar
- G01 - MEASURING TESTING
Information Patent Grant
Methods of determining corrections for a patterning process
- Patent number 10,877,381
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for design of a metrology target
- Patent number 10,437,163
- Issue date Oct 8, 2019
- ASML Netherlands B.V.
- Maurits Van Der Schaar
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, device manufacturing method and associated...
- Patent number 10,025,193
- Issue date Jul 17, 2018
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Deformation pattern recognition method, pattern transferring method...
- Patent number 9,753,377
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
- Patent number 9,291,916
- Issue date Mar 22, 2016
- ASML Netherlands B.V.
- Stefan Cornelis Theodorus Van Der Sanden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
- Patent number 8,976,355
- Issue date Mar 10, 2015
- ASML Netherlands B.V.
- Stefan Cornelis Theodorus Van Der Sanden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20230168591
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20220229373
- Publication date Jul 21, 2022
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20220011681
- Publication date Jan 13, 2022
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20210080836
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Design of a Metrology Target
- Publication number 20200033741
- Publication date Jan 30, 2020
- ASML NETHERLANDS B.V.
- Maurits VAN DER SCHAAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
- Publication number 20200019067
- Publication date Jan 16, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20180292761
- Publication date Oct 11, 2018
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Design of a Metrology Target
- Publication number 20180017881
- Publication date Jan 18, 2018
- ASML NETHERLANDS B.V.
- Maurits VAN DER SCHAAR
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
- Publication number 20160334712
- Publication date Nov 17, 2016
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...
- Publication number 20150205213
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
- Publication number 20150153656
- Publication date Jun 4, 2015
- ASML NETHERLANDS B.V.
- Stefan Cornelis Theodorus VAN DER SANDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
- Publication number 20130230797
- Publication date Sep 5, 2013
- ASML NETHERLANDS B.V.
- Stefan Cornelis Theodorus VAN DER SANDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Stefan Cornelis Theodorus Van Der Sanden

Person

Patents Grantslast 30 patents

Methods of determining corrections for a patterning process, device...

Methods of determining corrections for a patterning process, device...

Lithographic method and lithographic apparatus

Methods of determining corrections for a patterning process, device...

Lithographic method and lithographic apparatus

Method and apparatus for design of a metrology target

Methods of determining corrections for a patterning process

Method and apparatus for design of a metrology target

Lithographic apparatus, device manufacturing method and associated...

Deformation pattern recognition method, pattern transferring method...

Method of applying a pattern to a substrate, device manufacturing m...

Method of applying a pattern to a substrate, device manufacturing m...

Patents Applicationslast 30 patents

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

Method and Apparatus for Design of a Metrology Target

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS

LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS

Method and Apparatus for Design of a Metrology Target

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...

DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...

Method of Applying a Pattern to a Substrate, Device Manufacturing M...

Method of Applying a Pattern to a Substrate, Device Manufacturing M...