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Stefan Hien
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Austin, TX, US
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last 30 patents
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Patent Grant
Method for producing resist structures
Patent number
6,703,190
Issue date
Mar 9, 2004
Infineon Technologies AG
Klaus Elian
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
Method for producing resist structures
Publication number
20030008240
Publication date
Jan 9, 2003
Klaus Elian
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC