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Method for producing a micromembrane pump body
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Patent number 6,395,638
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Issue date May 28, 2002
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Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
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Reinhard Linnemann
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Micromembrane pump
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Patent number 6,261,066
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Issue date Jul 17, 2001
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung E.V.
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Reinhard Linnemann
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Piezoelectrically actuated microvalve
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Patent number 6,142,444
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Issue date Nov 7, 2000
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Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
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Stefan Kluge
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Piezoelectrically actuated microvalve
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Patent number 6,131,879
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Issue date Oct 17, 2000
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Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
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Stefan Kluge
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...