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Stefan Koehler
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Rainau, DE
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last 30 patents
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Patent Grant
Cleaning module, EUV lithography device and method for the cleaning...
Patent number
9,046,794
Issue date
Jun 2, 2015
Carl Zeiss SMT GmbH
Stefan Hembacher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography device and method for processing an optical element
Patent number
8,885,141
Issue date
Nov 11, 2014
Carl Zeiss SMT GmbH
Wolfgang Singer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection objective
Patent number
7,557,902
Issue date
Jul 7, 2009
Carl Zeiss SMT AG
Udo Dinger
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR AVOIDING CONTAMINATION AND EUV-LITHOGRAPHY-SYSTEM
Publication number
20120086925
Publication date
Apr 12, 2012
Carl Zeiss SMT GMBH
Dieter KRAUS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV Lithography Device and Method For Processing An Optical Element
Publication number
20110279799
Publication date
Nov 17, 2011
Carl Zeiss SMT GMBH
Wolfgang Singer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE
Publication number
20110058147
Publication date
Mar 10, 2011
Carl Zeiss SMT AG
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Application
CLEANING MODULE, EUV LITHOGRAPHY DEVICE AND METHOD FOR THE CLEANING...
Publication number
20110043774
Publication date
Feb 24, 2011
Carl Zeiss SMT AG
Stefan HEMBACHER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR REMOVING CONTAMINANTS FROM A SURFACE
Publication number
20100071720
Publication date
Mar 25, 2010
Carl Zeiss SMT AG
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Application
Euv projection lens with mirrors made from material with differing...
Publication number
20070035814
Publication date
Feb 15, 2007
Udo Dinger
G02 - OPTICS