Stefan Krone

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Control device for actuating an actuator unit of a lithography syst...
- Patent number 10,983,443
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Stefan Krone
- G02 - OPTICS
Information Patent Grant
Component for a projection exposure apparatus
- Patent number 10,866,528
- Issue date Dec 15, 2020
- Carl Zeiss SMT GmbH
- Thomas Wolfsteiner
- G02 - OPTICS
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,444,633
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,437,155
- Issue date Oct 8, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for controlling positioning of multiple adjustabl...
- Patent number 10,018,803
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for displacing at least one optical component
- Patent number 9,851,554
- Issue date Dec 26, 2017
- Carl Zeiss SMT GmbH
- Stefan Krone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM, TEST DEVICE, LITHOGRAPHY APPARATUS, ARRANGEMENT AND...
- Publication number 20240302754
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G01 - MEASURING TESTING
Information Patent Application
METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT
- Publication number 20240302453
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240288777
- Publication date Aug 29, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240280916
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS
- Publication number 20240027914
- Publication date Jan 25, 2024
- Carl Zeiss SMT GMBH
- Holger Sontag
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPONENT FOR A PROJECTION EXPOSURE APPARATUS
- Publication number 20190324372
- Publication date Oct 24, 2019
- Carl Zeiss SMT GMBH
- Thomas Wolfsteiner
- G02 - OPTICS
Information Patent Application
CONTROL DEVICE FOR ACTUATING AN ACTUATOR UNIT OF A LITHOGRAPHY SYST...
- Publication number 20190302626
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067400
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067399
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...
- Publication number 20170038555
- Publication date Feb 9, 2017
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
METHOD FOR DISPLACING AT LEAST ONE OPTICAL COMPONENT
- Publication number 20160320608
- Publication date Nov 3, 2016
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS

Stefan Krone

Person

Patents Grantslast 30 patents

Control device for actuating an actuator unit of a lithography syst...

Component for a projection exposure apparatus

Sensor assembly and method for determining respective positions of...

Sensor assembly and method for determining respective positions of...

Device and method for controlling positioning of multiple adjustabl...

Method for displacing at least one optical component

Patents Applicationslast 30 patents

OPTICAL SYSTEM, TEST DEVICE, LITHOGRAPHY APPARATUS, ARRANGEMENT AND...

METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT

OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD

OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD

ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS

COMPONENT FOR A PROJECTION EXPOSURE APPARATUS

CONTROL DEVICE FOR ACTUATING AN ACTUATOR UNIT OF A LITHOGRAPHY SYST...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...

METHOD FOR DISPLACING AT LEAST ONE OPTICAL COMPONENT