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STEFAN LEIDICH
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CHEMNITZ, DE
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Patents Grants
last 30 patents
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Patent Grant
Electrostatically actuated micro-mechanical switching device
Patent number
8,610,520
Issue date
Dec 17, 2013
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Joerg Froemel
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE
Publication number
20110303515
Publication date
Dec 15, 2011
SONY CORPORATION
JÖERG FRÖEMEL
H01 - BASIC ELECTRIC ELEMENTS