Stefan Lippoldt

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Aalen, DE

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Patents Applicationslast 30 patents

Information Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230384685
- Publication date Nov 30, 2023
- Carl Zeiss SMT GMBH
- Arno Schmittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230384686
- Publication date Nov 30, 2023
- Carl Zeiss SMT GMBH
- Arno Schmittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD FACET FOR A FIELD FACET MIRROR OF A PROJECTION EXPOSURE SYSTEM
- Publication number 20230205099
- Publication date Jun 29, 2023
- Carl Zeiss SMT GMBH
- Stefan Lippoldt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY