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Stefan Michael Bruno Bäumer
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's-Gravenhage, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Laser focussing module
Patent number
12,007,693
Issue date
Jun 11, 2024
ASML Netherlands B.V.
Ruud Antonius Catharina Maria Beerens
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Optical device and spectrometer comprising such a device
Patent number
11,378,448
Issue date
Jul 5, 2022
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Fabrizio Silvestri
G01 - MEASURING TESTING
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Patent Grant
Method of determining an overlay error, manufacturing method and sy...
Patent number
10,712,674
Issue date
Jul 14, 2020
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELUK ONDERZOEK TNO
Stefan Kuiper
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LASER FOCUSSING MODULE
Publication number
20220206397
Publication date
Jun 30, 2022
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria BEERENS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL DEVICE AND SPECTROMETER COMPRISING SUCH A DEVICE
Publication number
20210302230
Publication date
Sep 30, 2021
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Fabrizio SILVESTRI
G02 - OPTICS
Information
Patent Application
METHOD OF DETERMINING AN OVERLAY ERROR, MANUFACTURING METHOD AND SY...
Publication number
20180329312
Publication date
Nov 15, 2018
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Stefan Kuiper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY