Stefan Michiel WITTE

Person

Hoofddorp, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,391,677
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G01 - MEASURING TESTING
Information Patent Grant
Alignment measurement system
- Patent number 11,042,096
- Issue date Jun 22, 2021
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring a structure on a substrate
- Patent number 10,788,765
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 10,648,919
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method, inspection apparatus and illumination method and...
- Patent number 10,459,347
- Issue date Oct 29, 2019
- ASML Netherlands B.V.
- Dirk Ewoud Boonzajer Flaes
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus alignment sensor and method
- Patent number 10,386,735
- Issue date Aug 20, 2019
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and method
- Patent number 10,088,762
- Issue date Oct 2, 2018
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, inspection method and manufacturing method
- Patent number 9,632,039
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...
- Publication number 20240003809
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...
- Publication number 20240004312
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and Apparatus for Predicting Performance of a Measurement M...
- Publication number 20200232931
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Stefan Michiel WITTE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Measurement System
- Publication number 20200142319
- Publication date May 7, 2020
- ASML Netherlands B.V.
- Stefan Michiel WITTE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MEASURING A STRUCTURE ON A SUBSTRATE
- Publication number 20190354026
- Publication date Nov 21, 2019
- ASML NETHERLANDS B.V.
- Stefan Michiel WITTE
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for Predicting Performance of a Measurement M...
- Publication number 20180348145
- Publication date Dec 6, 2018
- ASML NETHERLANDS B.V.
- Stefan Michiel WITTE
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus Alignment Sensor and Method
- Publication number 20180246423
- Publication date Aug 30, 2018
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection Method, Inspection Apparatus and Illumination Method and...
- Publication number 20170269482
- Publication date Sep 21, 2017
- Stichting VU
- Dirk Ewoud Boonzajer Flaes
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus and Method
- Publication number 20170176879
- Publication date Jun 22, 2017
- Stichting VU
- Stefan Michiel WITTE
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus, Inspection Method And Manufacturing Method
- Publication number 20160061750
- Publication date Mar 3, 2016
- Vrije Universiteit Amsterdam
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Microscopic Imaging Apparatus and Method to Detect a Microscopic Image
- Publication number 20150234170
- Publication date Aug 20, 2015
- Stefan Michiel Witte
- G02 - OPTICS

Stefan Michiel WITTE

Person

Patents Grantslast 30 patents

Methods and apparatus for predicting performance of a measurement m...

Alignment measurement system

Method and apparatus for measuring a structure on a substrate

Methods and apparatus for predicting performance of a measurement m...

Inspection method, inspection apparatus and illumination method and...

Lithographic apparatus alignment sensor and method

Inspection apparatus and method

Inspection apparatus, inspection method and manufacturing method

Patents Applicationslast 30 patents

METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...

METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...

Methods and Apparatus for Predicting Performance of a Measurement M...

Alignment Measurement System

METHOD AND APPARATUS FOR MEASURING A STRUCTURE ON A SUBSTRATE

Methods and Apparatus for Predicting Performance of a Measurement M...

Lithographic Apparatus Alignment Sensor and Method

Inspection Method, Inspection Apparatus and Illumination Method and...

Inspection Apparatus and Method

Inspection Apparatus, Inspection Method And Manufacturing Method

Microscopic Imaging Apparatus and Method to Detect a Microscopic Image