Stefan Nikles

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Cambridge, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for building three-dimensional MEMS elements
- Patent number 9,573,802
- Issue date Feb 21, 2017
- Massachusetts Institute of Technology
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for building three-dimensional MEMS elements
- Patent number 9,511,995
- Issue date Dec 6, 2016
- Massachusetts Institute of Technology
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for building three-dimensional MEMS elements
- Patent number 9,217,755
- Issue date Dec 22, 2015
- Massachusetts Institute of Technology
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS
- Publication number 20130207511
- Publication date Aug 15, 2013
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS
- Publication number 20130209747
- Publication date Aug 15, 2013
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS
- Publication number 20130205895
- Publication date Aug 15, 2013
- Brian Lee Wardle
- B81 - MICRO-STRUCTURAL TECHNOLOGY