Stefan Piehler

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Stuttgart, DE

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Patents Grantslast 30 patents

Information Patent Grant
EUV light source with a separation device
- Patent number 11,968,767
- Issue date Apr 23, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Oliver Schlosser
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical module, laser amplifier system, method and use
- Patent number 10,574,024
- Issue date Feb 25, 2020
- Universitat Stuttgart
- Stefan Piehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for quantitatively sensing the power fraction of...
- Patent number 10,488,250
- Issue date Nov 26, 2019
- Universitat Stuttgart
- Stefan Piehler
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EUV EXCITATION LIGHT SOURCE AND EUV LIGHT SOURCE
- Publication number 20240074023
- Publication date Feb 29, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING A RADIATION FIELD AMPLIFYING SYSTEM
- Publication number 20200106233
- Publication date Apr 2, 2020
- UNIVERSITAET STUTTGART
- Tom Dietrich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR QUANTITATIVELY SENSING THE POWER FRACTION OF...
- Publication number 20180066983
- Publication date Mar 8, 2018
- UNIVERSITAT STUTTGART
- Stefan PIEHLER
- G01 - MEASURING TESTING
Information Patent Application
Optical Module, Laser Amplifier System, Method and Use
- Publication number 20170310073
- Publication date Oct 26, 2017
- UNIVERSITAT STUTTGART
- Stefan Piehler
- H01 - BASIC ELECTRIC ELEMENTS