Stefan RHYNER

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Buchs, CH

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Patents Grantslast 30 patents

Information Patent Grant
RF power delivery to vacuum plasma processing
- Patent number 11,380,520
- Issue date Jul 5, 2022
- EVATEC AG
- Stefan Rhyner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RF POWER DELIVERY TO VACUUM PLASMA PROCESSING
- Publication number 20210358718
- Publication date Nov 18, 2021
- Evatec AG
- Stefan Rhyner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF FEED LINE
- Publication number 20130340940
- Publication date Dec 26, 2013
- Peter HEISS
- H01 - BASIC ELECTRIC ELEMENTS