Stefan Sawusch

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Pirna, DE

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Patents Grantslast 30 patents

Information Patent Grant
Flow control method for multizone gas distribution
- Patent number 8,464,741
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Stefan Sawusch
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
FLOW CONTROL METHOD FOR MULTIZONE GAS DISTRIBUTION
- Publication number 20110277847
- Publication date Nov 17, 2011
- TOKYO ELECTRON LIMITED
- Stefan Sawusch
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
FLOW CONTROL SYSTEM AND METHOD FOR MULTIZONE GAS DISTRIBUTION
- Publication number 20090178714
- Publication date Jul 16, 2009
- TOKYO ELECTRON LIMITED
- Stefan Sawusch
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS