Stefan Schaff

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Ellwangen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical arrangement, in particular lithography system
- Patent number 10,809,636
- Issue date Oct 20, 2020
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 10,254,466
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 9,671,548
- Issue date Jun 6, 2017
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
- Publication number 20190339626
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT
- Publication number 20170261680
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
Optical Waveguide for Guiding Illumination Light
- Publication number 20150362660
- Publication date Dec 17, 2015
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS