TREA

Stefan Scharl

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  • Wasserburg, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure system
    • Patent number 8,248,581
    • Issue date Aug 21, 2012
    • KLEO AG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method and device for producing exposed structures
    • Patent number 8,027,018
    • Issue date Sep 27, 2011
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure system
    • Patent number 7,705,967
    • Issue date Apr 27, 2010
    • KLEO Maschinenbau AG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Lithography exposure device having a plurality of radiation sources
    • Patent number 7,652,750
    • Issue date Jan 26, 2010
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Apparatus for exposing substrate materials
    • Patent number 7,019,818
    • Issue date Mar 28, 2006
    • KLEO Halbleitertechnik BmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Lithography exposure device
    • Patent number 6,859,261
    • Issue date Feb 22, 2005
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    Exposure system
    • Publication number 20080316454
    • Publication date Dec 25, 2008
    • KLEO Maschinenbau AG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Exposure system
    • Publication number 20060244943
    • Publication date Nov 2, 2006
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Lithography exposure device
    • Publication number 20060170893
    • Publication date Aug 3, 2006
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method and device for producing exposed structures
    • Publication number 20050282087
    • Publication date Dec 22, 2005
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Apparatus for exposing substrate materials
    • Publication number 20050083509
    • Publication date Apr 21, 2005
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Lithography exposure device
    • Publication number 20030160948
    • Publication date Aug 28, 2003
    • KLEO Halbleitertechnik GmbH & Co KG
    • Hans Opower
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY