Stefan Schubert

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detector equalization during the imaging of objects with...
- Patent number 11,645,740
- Issue date May 9, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam system
- Patent number 11,562,881
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,164,715
- Issue date Nov 2, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle microscope
- Patent number 11,158,482
- Issue date Oct 26, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,049,686
- Issue date Jun 29, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 10,811,215
- Issue date Oct 20, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating the same
- Patent number 10,541,112
- Issue date Jan 21, 2020
- Carl Zeiss Microscopy GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,535,494
- Issue date Jan 14, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,163,603
- Issue date Dec 25, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating the same
- Patent number 10,121,635
- Issue date Nov 6, 2018
- Carl Zeiss Microscopy GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning particle microscope having an energy selective detector sy...
- Patent number 9,653,255
- Issue date May 16, 2017
- Carl Zeiss Microscopy GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing a charged particle system
- Patent number 9,530,613
- Issue date Dec 27, 2016
- Applied Materials Israel, Ltd.
- Steven R. Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 9,324,537
- Issue date Apr 26, 2016
- Applied Materials Israel, Ltd.
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle multi-beam inspection system and method of operati...
- Patent number 9,263,233
- Issue date Feb 16, 2016
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing a charged particle imaging system
- Patent number 9,099,282
- Issue date Aug 4, 2015
- Applied Materials Israel, Ltd.
- Steven R. Rogers
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATI...
- Publication number 20240371596
- Publication date Nov 7, 2024
- Carl Zeiss MultiSEM GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...
- Publication number 20240222069
- Publication date Jul 4, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...
- Publication number 20230245852
- Publication date Aug 3, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM
- Publication number 20230207251
- Publication date Jun 29, 2023
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METH...
- Publication number 20230170181
- Publication date Jun 1, 2023
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
- Publication number 20220351936
- Publication date Nov 3, 2022
- Carl Zeiss MultiSEM GmbH
- Nicolas Kaufmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A...
- Publication number 20220277927
- Publication date Sep 1, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...
- Publication number 20220254600
- Publication date Aug 11, 2022
- Carl Zeiss MultiSEM GmbH
- Gregor Frank Dellemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20220108864
- Publication date Apr 7, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME
- Publication number 20210217577
- Publication date Jul 15, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...
- Publication number 20210192700
- Publication date Jun 24, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Particle Beam System
- Publication number 20210142980
- Publication date May 13, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20200411274
- Publication date Dec 31, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-beam particle microscope
- Publication number 20200373116
- Publication date Nov 26, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20200098541
- Publication date Mar 26, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20190355545
- Publication date Nov 21, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20190122852
- Publication date Apr 25, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME
- Publication number 20190066974
- Publication date Feb 28, 2019
- CARL ZEISS MICROSCOPY GMBH
- Stefan SCHUBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20170316912
- Publication date Nov 2, 2017
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20170294287
- Publication date Oct 12, 2017
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME
- Publication number 20160247663
- Publication date Aug 25, 2016
- CARL ZEISS MICROSCOPY GMBH
- Stefan SCHUBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM
- Publication number 20160240344
- Publication date Aug 18, 2016
- CARL ZEISS MICROSCOPY GMBH
- Thomas KEMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20160181054
- Publication date Jun 23, 2016
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSING A CHARGED PARTICLE SYSTEM
- Publication number 20150287568
- Publication date Oct 8, 2015
- Steven R. Rodgers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATI...
- Publication number 20150090879
- Publication date Apr 2, 2015
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM
- Publication number 20150008331
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Thomas KEMEN
- H01 - BASIC ELECTRIC ELEMENTS

Stefan Schubert

Person

Patents Grantslast 30 patents

Particle beam system and the use thereof for flexibly setting the c...

Particle beam system and method for the particle-optical examinatio...

Method for detector equalization during the imaging of objects with...

Charged particle beam system

Objective lens arrangement usable in particle-optical systems

Charged particle beam system

Multi-beam particle microscope

Particle beam system and method for the particle-optical examinatio...

Charged particle beam system

Objective lens arrangement usable in particle-optical systems

Charged particle beam system and method of operating the same

Particle beam system and method for the particle-optical examinatio...

Charged particle inspection method and charged particle system

Particle beam system and method for the particle-optical examinatio...

Charged particle beam system and method of operating the same

Scanning particle microscope having an energy selective detector sy...

Focusing a charged particle system

Charged particle inspection method and charged particle system

Charged particle multi-beam inspection system and method of operati...

Focusing a charged particle imaging system

Patents Applicationslast 30 patents

MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATI...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...

MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM

MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METH...

MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION

PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A...

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...

Charged Particle Beam System

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME

METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...

Particle Beam System

CHARGED PARTICLE BEAM SYSTEM

Multi-beam particle microscope

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

CHARGED PARTICLE BEAM SYSTEM

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME

CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

FOCUSING A CHARGED PARTICLE SYSTEM

CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATI...

CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM