Stefan SCHULTE

Person

Aalen-Waldhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Measuring apparatus for interferometrically determining a surface s...
- Patent number 11,892,283
- Issue date Feb 6, 2024
- Carl Zeiss SMT GmbH
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
Method for calibrating a measuring apparatus
- Patent number 11,774,237
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Mirror, in particular for a microlithographic projection exposure s...
- Patent number 11,360,393
- Issue date Jun 14, 2022
- Carl Zeiss SMT GmbH
- Ben Wylie-Van Eerd
- G02 - OPTICS
Information Patent Grant
Compensation optical system for an interferometric measuring system
- Patent number 11,199,396
- Issue date Dec 14, 2021
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a shape of an optical surface based on computat...
- Patent number 8,593,642
- Issue date Nov 26, 2013
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,508,749
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,264,695
- Issue date Sep 11, 2012
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 8,159,678
- Issue date Apr 17, 2012
- Carl Zeiss SMT GmbH
- Ralf Arnold
Information Patent Grant
Optical element and method of calibrating a measuring apparatus com...
- Patent number 8,089,634
- Issue date Jan 3, 2012
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a deviation of an optical surface from a target...
- Patent number 7,936,521
- Issue date May 3, 2011
- Carl Zeiss SMT GmbH
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Grant
Methods of testing and manufacturing optical elements
- Patent number 7,602,502
- Issue date Oct 13, 2009
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing an optical component
- Patent number 7,581,305
- Issue date Sep 1, 2009
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B24 - GRINDING POLISHING
Information Patent Grant
Phase shifting interferometric method, interferometer apparatus and...
- Patent number 7,274,467
- Issue date Sep 25, 2007
- Carl Zeiss SMT AG
- Bernd Doerband
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric measurement device for determining the birefringenc...
- Patent number 7,212,289
- Issue date May 1, 2007
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
Method of calibrating an interferometer optics and method of proces...
- Patent number 7,123,365
- Issue date Oct 17, 2006
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer system and method for recording an interferogram usi...
- Patent number 7,002,694
- Issue date Feb 21, 2006
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT DEVICE FOR INTERFEROMETRIC MEASUREMENT OF A SURFACE SHAPE
- Publication number 20240077305
- Publication date Mar 7, 2024
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, METHOD FOR MEASURING BY INTERFEROMETRY, PROC...
- Publication number 20240035811
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Stefan SCHULTE
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT
- Publication number 20220349700
- Publication date Nov 3, 2022
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS FOR INTERFEROMETRICALLY DETERMINING A SURFACE S...
- Publication number 20220221269
- Publication date Jul 14, 2022
- Carl Zeiss SMT GMBH
- Stefan SCHULTE
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CALIBRATING A MEASURING APPARATUS
- Publication number 20220187061
- Publication date Jun 16, 2022
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM
- Publication number 20200225028
- Publication date Jul 16, 2020
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE S...
- Publication number 20200174379
- Publication date Jun 4, 2020
- Carl Zeiss SMT GMBH
- Ben WYLIE-VAN EERD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING A SPHERICAL-ASTIGMATIC OPTICAL SURFACE
- Publication number 20190271532
- Publication date Sep 5, 2019
- Carl Zeiss SMT GMBH
- Stefan SCHULTE
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING A SPHERICAL-ASTIGMATIC OPTICAL SURFACE
- Publication number 20160298951
- Publication date Oct 13, 2016
- Carl Zeiss SMT GMBH
- Stefan SCHULTE
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
- Publication number 20140078513
- Publication date Mar 20, 2014
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20120330609
- Publication date Dec 27, 2012
- Carl Zeiss SMT GMBH
- Ralf ARNOLD
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
- Publication number 20120229814
- Publication date Sep 13, 2012
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20110141484
- Publication date Jun 16, 2011
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ELEMENT AND METHOD OF CALIBRATING A MEASURING APPARATUS COM...
- Publication number 20100177321
- Publication date Jul 15, 2010
- Carl Zeiss SMT AG
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...
- Publication number 20100177320
- Publication date Jul 15, 2010
- Carl Zeiss SMT AG
- Ralf Arnold
- G01 - MEASURING TESTING
Information Patent Application
Methods of testing and manufacturing optical elements
- Publication number 20080316500
- Publication date Dec 25, 2008
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Application
Phase shifting interferometric method, interferometer apparatus and...
- Publication number 20060146342
- Publication date Jul 6, 2006
- Carl Zeiss SMT AG
- Bernd Doerband
- G01 - MEASURING TESTING
Information Patent Application
Method of calibrating an interferometer and method of manufacturing...
- Publication number 20050275849
- Publication date Dec 15, 2005
- Carl Zeiss SMT AG
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Application
Method of manufacturing an optical component and optical system usi...
- Publication number 20050223539
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B24 - GRINDING POLISHING
Information Patent Application
Interferometer system, method for recording an interferogram and me...
- Publication number 20040190002
- Publication date Sep 30, 2004
- Carl Zeiss SMT AG
- Stefan Schulte
- G01 - MEASURING TESTING

Stefan SCHULTE

Person

Patents Grantslast 30 patents

Measuring apparatus for interferometrically determining a surface s...

Method for calibrating a measuring apparatus

Mirror, in particular for a microlithographic projection exposure s...

Compensation optical system for an interferometric measuring system

Method of measuring a shape of an optical surface based on computat...

Method of measuring a deviation of an optical surface from a target...

Method of measuring a deviation of an optical surface from a target...

Method of measuring a deviation of an optical surface from a target...

Optical element and method of calibrating a measuring apparatus com...

Method of measuring a deviation of an optical surface from a target...

Methods of testing and manufacturing optical elements

Method of manufacturing an optical component

Phase shifting interferometric method, interferometer apparatus and...

Interferometric measurement device for determining the birefringenc...

Method of calibrating an interferometer optics and method of proces...

Interferometer system and method for recording an interferogram usi...

Patents Applicationslast 30 patents

MEASUREMENT DEVICE FOR INTERFEROMETRIC MEASUREMENT OF A SURFACE SHAPE

MEASUREMENT APPARATUS, METHOD FOR MEASURING BY INTERFEROMETRY, PROC...

MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT

MEASURING APPARATUS FOR INTERFEROMETRICALLY DETERMINING A SURFACE S...

METHOD FOR CALIBRATING A MEASURING APPARATUS

COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM

MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE S...

METHOD FOR MEASURING A SPHERICAL-ASTIGMATIC OPTICAL SURFACE

METHOD FOR MEASURING A SPHERICAL-ASTIGMATIC OPTICAL SURFACE

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

OPTICAL ELEMENT AND METHOD OF CALIBRATING A MEASURING APPARATUS COM...

METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET...

Methods of testing and manufacturing optical elements

Phase shifting interferometric method, interferometer apparatus and...

Method of calibrating an interferometer and method of manufacturing...

Method of manufacturing an optical component and optical system usi...

Interferometer system, method for recording an interferogram and me...