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Stefan Schunck
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Munchen, DE
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last 30 patents
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Patent Grant
Method of producing a perforated mask for particle radiation
Patent number
6,773,854
Issue date
Aug 10, 2004
Infineon Technologies AG
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of producing a perforated mask for particle radiation
Publication number
20030059689
Publication date
Mar 27, 2003
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS