Stefan Seitz

Follow

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Facet mirror for an illumination optical unit of a projection expos...
- Patent number 11,789,367
- Issue date Oct 17, 2023
- Carl Zeiss SMT GmbH
- Willi Anderl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optic for EUV projection lithography
- Patent number 10,379,444
- Issue date Aug 13, 2019
- Carl Zeiss SMT GmbH
- Matthias Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS
- Publication number 20240027914
- Publication date Jan 25, 2024
- Carl Zeiss SMT GMBH
- Holger Sontag
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOS...
- Publication number 20220206398
- Publication date Jun 30, 2022
- Carl Zeiss SMT GMBH
- Willi Anderl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20180074410
- Publication date Mar 15, 2018
- Carl Zeiss SMT GMBH
- Matthias Mueller
- G02 - OPTICS