Stefan Troeger

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Assembly, in particular in a microlithographic projection exposure...
- Patent number 12,105,434
- Issue date Oct 1, 2024
- Carl Zeiss SMT GmbH
- Stefan Troeger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,526,089
- Issue date Dec 13, 2022
- Carl Zeiss SMT GmbH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly in a microlithographic projection exposure apparatus
- Patent number 10,571,816
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ASSEMBLY, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE...
- Publication number 20230034958
- Publication date Feb 2, 2023
- Carl Zeiss SMT GMBH
- Stefan Troeger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405543
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20190361362
- Publication date Nov 28, 2019
- Carl Zeiss SMT GMBH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY