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Stefan Troeger
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Ulm, DE
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Patents Grants
last 30 patents
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Patent Grant
Compensation of creep effects in an imaging device
Patent number
11,526,089
Issue date
Dec 13, 2022
Carl Zeiss SMT GmbH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Assembly in a microlithographic projection exposure apparatus
Patent number
10,571,816
Issue date
Feb 25, 2020
Carl Zeiss SMT GmbH
Jasper Wesselingh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ASSEMBLY, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE...
Publication number
20230034958
Publication date
Feb 2, 2023
Carl Zeiss SMT GMBH
Stefan Troeger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
Publication number
20210405543
Publication date
Dec 30, 2021
Carl Zeiss SMT GMBH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20190361362
Publication date
Nov 28, 2019
Carl Zeiss SMT GMBH
Jasper Wesselingh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY