Stefan Xalter

Person

Obenkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for semiconductor lithography
- Patent number 11,281,114
- Issue date Mar 22, 2022
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Connection arrangement for a force-fit connection between ceramic c...
- Patent number 10,571,813
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Karsten Siegmanski
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Diaphragm changing device
- Patent number 10,139,733
- Issue date Nov 27, 2018
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,897,925
- Issue date Feb 20, 2018
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging arrangement with simplified manufacture
- Patent number 9,804,500
- Issue date Oct 31, 2017
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for semiconductor lithography
- Patent number 9,383,544
- Issue date Jul 5, 2016
- Carl Zeiss SMT GmbH
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Low-contamination optical arrangement
- Patent number 9,316,930
- Issue date Apr 19, 2016
- Carl Zeiss SMT GmbH
- Yim-Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement in a projection exposure apparatus for EUV lith...
- Patent number 9,298,111
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Viktor Kulitzki
- G02 - OPTICS
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,239,229
- Issue date Jan 19, 2016
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,019,475
- Issue date Apr 28, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,013,684
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,001,309
- Issue date Apr 7, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,659,745
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 8,570,676
- Issue date Oct 29, 2013
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,542,346
- Issue date Sep 24, 2013
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 8,339,577
- Issue date Dec 25, 2012
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for semiconductor lithography
- Patent number 8,269,947
- Issue date Sep 18, 2012
- Carl Zeiss SMT GmbH
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Diaphragm changing device
- Patent number 8,089,707
- Issue date Jan 3, 2012
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Housing structure
- Patent number 8,018,664
- Issue date Sep 13, 2011
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Optical assembly
- Patent number 7,929,227
- Issue date Apr 19, 2011
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 7,791,826
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Diaphragm changing device
- Patent number 7,684,125
- Issue date Mar 23, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Actuator device
- Patent number 7,589,921
- Issue date Sep 15, 2009
- Carl Zeiss SMT AG
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Grant
System for damping oscillations
- Patent number 6,897,599
- Issue date May 24, 2005
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical element deformation system
- Patent number 6,844,994
- Issue date Jan 18, 2005
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Optical arrangement
- Patent number 6,781,668
- Issue date Aug 24, 2004
- Carl-Zeiss-Stiftung
- Karl-Heinz Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Oscillation damping system
- Patent number 6,700,715
- Issue date Mar 2, 2004
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical system
- Patent number 6,583,850
- Issue date Jun 24, 2003
- Carl-Zeiss-Stiftung
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical systems and methods of compensating rotationally non-symmet...
- Patent number 6,522,392
- Issue date Feb 18, 2003
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY
- Publication number 20230350307
- Publication date Nov 2, 2023
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20220107567
- Publication date Apr 7, 2022
- Carl Zeiss SMT GMBH
- Benjahman Julius Modeste
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20210080841
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20180246415
- Publication date Aug 30, 2018
- Carl Zeiss SMT GMBH
- Stefan Xalter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...
- Publication number 20170184982
- Publication date Jun 29, 2017
- Carl Zeiss SMT GMBH
- Karsten Siegmanski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20160282724
- Publication date Sep 29, 2016
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20160266502
- Publication date Sep 15, 2016
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING ARRANGEMENT WITH SIMPLIFIED MANUFACTURE
- Publication number 20160179013
- Publication date Jun 23, 2016
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20150300807
- Publication date Oct 22, 2015
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AN...
- Publication number 20150168853
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Mathias Schumacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140233006
- Publication date Aug 21, 2014
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140226141
- Publication date Aug 14, 2014
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20140021324
- Publication date Jan 23, 2014
- Mathias Schumacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20130278911
- Publication date Oct 24, 2013
- Guido Limbach
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20120327385
- Publication date Dec 27, 2012
- Carl Zeiss SMT GMBH
- Frank Melzer
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20120293784
- Publication date Nov 22, 2012
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...
- Publication number 20120188523
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Viktor Kulitsky
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20120075611
- Publication date Mar 29, 2012
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
HOUSING STRUCTURE
- Publication number 20110216428
- Publication date Sep 8, 2011
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
LOW-CONTAMINATION OPTICAL ARRANGEMENT
- Publication number 20110194091
- Publication date Aug 11, 2011
- Carl Zeiss SMT GMBH
- Yim-Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20110181857
- Publication date Jul 28, 2011
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20100271607
- Publication date Oct 28, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20100134777
- Publication date Jun 3, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20100039629
- Publication date Feb 18, 2010
- Carl Zeiss SMT AG
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
HOUSING STRUCTURE
- Publication number 20090303626
- Publication date Dec 10, 2009
- Carl Zeiss SMT AG
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20090244509
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Guido Limbach
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20090207396
- Publication date Aug 20, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
- Publication number 20090185148
- Publication date Jul 23, 2009
- Carl Zeiss SMT AG
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20090135395
- Publication date May 28, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Actuator Device
- Publication number 20090052066
- Publication date Feb 26, 2009
- Yim-Bun Patrick Kwan
- G02 - OPTICS

Stefan Xalter

Person

Patents Grantslast 30 patents

Projection exposure apparatus for semiconductor lithography

Connection arrangement for a force-fit connection between ceramic c...

Diaphragm changing device

Method and device for monitoring multiple mirror arrays in an illum...

Optical imaging arrangement with simplified manufacture

Optical system for semiconductor lithography

Low-contamination optical arrangement

Optical arrangement in a projection exposure apparatus for EUV lith...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Optical system with an exchangeable, manipulable correction arrange...

Optical assembly

Optical system with an exchangeable, manipulable correction arrange...

Method and device for monitoring multiple mirror arrays in an illum...

Optical system for semiconductor lithography

Diaphragm changing device

Housing structure

Optical assembly

Optical assembly

Reflecting optical element with eccentric optical passageway

Diaphragm changing device

Actuator device

System for damping oscillations

Optical element deformation system

Optical arrangement

Oscillation damping system

Optical system

Optical systems and methods of compensating rotationally non-symmet...

Patents Applicationslast 30 patents

OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY

STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...

DIAPHRAGM CHANGING DEVICE

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

OPTICAL IMAGING ARRANGEMENT WITH SIMPLIFIED MANUFACTURE

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AN...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

LITHOGRAPHY APPARATUS AND METHOD

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...

DIAPHRAGM CHANGING DEVICE

HOUSING STRUCTURE

LOW-CONTAMINATION OPTICAL ARRANGEMENT

OPTICAL ASSEMBLY

OPTICAL ASSEMBLY

DIAPHRAGM CHANGING DEVICE

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

HOUSING STRUCTURE

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

SUPPORT FOR AN OPTICAL ELEMENT

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

Actuator Device