Stefanie Hilt

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method of operating a microlithographic projection apparatus and il...
- Patent number 10,444,631
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,910,359
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 9,753,375
- Issue date Sep 5, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,500,954
- Issue date Nov 22, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,310,690
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION APPARATUS AND IL...
- Publication number 20180217506
- Publication date Aug 2, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20160209759
- Publication date Jul 21, 2016
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146184
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146183
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
- Publication number 20150015862
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY