Steffen Frigge

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Chemnitz, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for thermally treating semiconductor wafers
- Patent number 7,151,060
- Issue date Dec 19, 2006
- Mattson Thermal Products GmbH
- Georg Roters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for minimizing the vapor deposition of tungsten oxide during...
- Patent number 7,094,637
- Issue date Aug 22, 2006
- Infineon Technologies AG
- Olaf Storbeck
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Device and method for thermally treating semiconductor wafers
- Publication number 20060105584
- Publication date May 18, 2006
- Georg Roters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for minimizing the vapor deposition of tungsten oxide during...
- Publication number 20040121569
- Publication date Jun 24, 2004
- Olaf Storbeck
- H01 - BASIC ELECTRIC ELEMENTS