Steffen Gerlach

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Giessen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Detecting defects by three-way die-to-die comparison with false maj...
- Patent number 7,657,077
- Issue date Feb 2, 2010
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay shift
- Patent number 7,387,859
- Issue date Jun 17, 2008
- Vistec Semiconductor Systems GmbH
- Steffen Gerlach
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for detecting defects in images
- Publication number 20060204109
- Publication date Sep 14, 2006
- Leica Microsystems Semiconductor GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for measuring overlay shift
- Publication number 20050037270
- Publication date Feb 17, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Steffen Gerlach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY