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STEFFEN KURTH
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THALHEIM, DE
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Patents Grants
last 30 patents
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Patent Grant
Control device for a micromirror, method for controlling a micromir...
Patent number
8,963,898
Issue date
Feb 24, 2015
Robert Bosch GmbH
Detlef Billep
G02 - OPTICS
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Patent Grant
Electrostatically actuated micro-mechanical switching device
Patent number
8,610,520
Issue date
Dec 17, 2013
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Joerg Froemel
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
MEMS vacuum sensor based on the friction principle
Patent number
8,186,225
Issue date
May 29, 2012
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Steffen Kurth
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
CONTROL DEVICE FOR A MICROMIRROR, METHOD FOR CONTROLLING A MICROMIR...
Publication number
20130127800
Publication date
May 23, 2013
Detlef BILLEP
G02 - OPTICS
Information
Patent Application
ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE
Publication number
20110303515
Publication date
Dec 15, 2011
SONY CORPORATION
JÖERG FRÖEMEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
Publication number
20100024562
Publication date
Feb 4, 2010
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
Steffen Kurth
G01 - MEASURING TESTING