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Steffen Steinert
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Jena, DE
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last 30 patents
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Patent Grant
Method for measuring photomasks
Patent number
11,899,358
Issue date
Feb 13, 2024
Carl Zeiss SMT GmbH
Dmitry Simakov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and apparatus for determining the position of structure elem...
Patent number
10,380,733
Issue date
Aug 13, 2019
Carl Zeiss SMT GmbH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MEASURING PHOTOMASKS
Publication number
20210255541
Publication date
Aug 19, 2021
Carl Zeiss SMT GMBH
Dmitry Simakov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING THE POSITION OF STRUCTURE ELEM...
Publication number
20170018064
Publication date
Jan 19, 2017
Carl Zeiss SMT GMBH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING