Steffen Weissenberg

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for qualifying a mask of a lithography system
- Patent number 12,353,126
- Issue date Jul 8, 2025
- Carl Zeiss SMT GmbH
- Asad Rasool
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SCREW TRANSMISSION DRIVE, AND RETICLE STAGE AND MEASURING DEVICE FO...
- Publication number 20250237968
- Publication date Jul 24, 2025
- Carl Zeiss SMT GMBH
- Stephan Zschäck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR QUALIFYING A MASK OF A LITHOGRAPHY SYSTEM
- Publication number 20240103360
- Publication date Mar 28, 2024
- Carl Zeiss SMT GMBH
- Asad Rasool
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY