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Steffen WINKLER
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Illumination system for a lithographic apparatus
Patent number
8,699,000
Issue date
Apr 15, 2014
ASML Netherlands B.V.
Steffen Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Illumination System for a Lithographic Apparatus
Publication number
20120162624
Publication date
Jun 28, 2012
ASML NETHERLANDS B.V.
Steffen WINKLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY