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Steffen Zunft
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Reutlingen, DE
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last 30 patents
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Patent Grant
Micromechanical device having a decoupled micromechanical structure
Patent number
10,843,917
Issue date
Nov 24, 2020
Robert Bosch GmbH
Steffen Zunft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MICROMECHANICAL DEVICE HAVING A DECOUPLED MICROMECHANICAL STRUCTURE
Publication number
20190276305
Publication date
Sep 12, 2019
ROBERT BOSCH GmbH
Steffen Zunft
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROMECHANICAL DEVICE HAVING A DECOUPLED MICROMECHANICAL STRUCTURE
Publication number
20170305740
Publication date
Oct 26, 2017
ROBERT BOSCH GmbH
Steffen Zunft
B81 - MICRO-STRUCTURAL TECHNOLOGY