Sten VOLLEBREGT

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s'-Gravenhage, NL

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Patents Grantslast 30 patents

Information Patent Grant
Graphene pellicle lithographic apparatus
- Patent number 11,467,486
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Evgenia Kurganova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS
- Publication number 20200406244
- Publication date Dec 31, 2020
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL