Stephan BACK

Person

Langenau, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 9,703,098
- Issue date Jul 11, 2017
- Carl Zeiss SMT GmbH
- Guido Soyez
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 9,423,695
- Issue date Aug 23, 2016
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,939,587
- Issue date Jan 27, 2015
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,376,559
- Issue date Feb 19, 2013
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,092,029
- Issue date Jan 10, 2012
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20180031827
- Publication date Feb 1, 2018
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20160357012
- Publication date Dec 8, 2016
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20150138521
- Publication date May 21, 2015
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20130155509
- Publication date Jun 20, 2013
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20120105958
- Publication date May 3, 2012
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR SETTING AN OPTICAL IMAGING PROPERTY IN A MICROLITHOGRAPH...
- Publication number 20080218716
- Publication date Sep 11, 2008
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lens Module Comprising at Least One Exchangeable Optical Element
- Publication number 20080137192
- Publication date Jun 12, 2008
- Guido Soyez
- G02 - OPTICS
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Stephan BACK

Person

Patents Grantslast 30 patents

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Imaging device in a projection exposure machine

Patents Applicationslast 30 patents

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

Imaging Device in a Projection Exposure Machine

METHOD FOR SETTING AN OPTICAL IMAGING PROPERTY IN A MICROLITHOGRAPH...

Lens Module Comprising at Least One Exchangeable Optical Element

Imaging device in a projection exposure machine