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Stephan Christiaan Quintus Libourel
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Positioning device, lithographic apparatus, method for compensating...
Patent number
10,962,890
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Wilhelmus Franciscus Johannes Simons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus, composite material and manufacturing method
Patent number
8,848,169
Issue date
Sep 30, 2014
ASML Netherlands B.V.
Mark Scholten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Positioning Device, Lithographic Apparatus, Method for Compensating...
Publication number
20200363732
Publication date
Nov 19, 2020
ASML NETHERLANDS B.V.
Wilhelmus Franciscus Johannes SIMONS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY