Stephan Ewald Sinkwitz

Follow

Person

Solingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Adaptive thermal control of lithographic chemical processes
- Patent number 6,927,835
- Issue date Aug 9, 2005
- ASML Netherlands B.V.
- Cassandra M Owen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC METHOD, APPARATUS AND CONTROLLER
- Publication number 20100104959
- Publication date Apr 29, 2010
- ASML NETHERLANDS B.V.
- Rik Teodoor Vangheluwe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Adaptive thermal control of lithographic chemical processes
- Publication number 20050057733
- Publication date Mar 17, 2005
- ASML NETHERLANDS B.V.
- Cassandra M Owen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY