Stephan HOFFMANN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,147,593
- Issue date Sep 29, 2015
- Lam Research AG
- Otto Lach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140097580
- Publication date Apr 10, 2014
- LAM RESEARCH AG
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS