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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,271,873
Issue date
Sep 18, 2007
ASML Netherlands B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
7,148,951
Issue date
Dec 12, 2006
ASML Netherlands B.V.
Nicolas Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,072,021
Issue date
Jul 4, 2006
ASML Netherlands B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FLUID HANDLING STRUCTURE, MODULE FOR AN IMMERSION LITHOGRAPHIC APPA...
Publication number
20120069309
Publication date
Mar 22, 2012
ASML NETHERLANDS B.V.
Paul WILLEMS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060232754
Publication date
Oct 19, 2006
ASML NETHERLANDS B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus
Publication number
20060087631
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Nicolas Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050254025
Publication date
Nov 17, 2005
ASML NETHERLANDS B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY