Stephan Mullender

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical element for radiation in the EUV and/or soft X-ray region a...
- Patent number 7,646,004
- Issue date Jan 12, 2010
- Carl Zeiss SMT AG
- Marco Wedowski
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION A...
- Publication number 20100067653
- Publication date Mar 18, 2010
- Carl Zeiss SMT AG
- Marco Wedowski
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical element for radiation in the EUV and/or soft X-ray region a...
- Publication number 20070114466
- Publication date May 24, 2007
- Marco Wedowski
- B82 - NANO-TECHNOLOGY