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Stephane Dana
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Tel Aviv, IL
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Patents Grants
last 30 patents
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Patent Grant
Track-based metrology method and apparatus
Patent number
8,513,625
Issue date
Aug 20, 2013
Applied Materials, Inc.
Stephane Dana
B82 - NANO-TECHNOLOGY
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Patent Grant
AFM-based lithography metrology tool
Patent number
6,392,229
Issue date
May 21, 2002
Applied Materials, Inc.
Stephane Dana
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
AFM-based lithography metrology tool
Publication number
20050205776
Publication date
Sep 22, 2005
APPLIED MATERIALS, INC.
Stephane Dana
G01 - MEASURING TESTING
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Patent Application
AFM-based lithography metrology tool
Publication number
20020158197
Publication date
Oct 31, 2002
APPLIED MATERIALS, INC.
Stephane Dana
B82 - NANO-TECHNOLOGY