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Stephane Durant
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Biarritz, FR
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last 30 patents
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Patent Grant
Optical defect amplification for improved sensitivity on patterned...
Patent number
8,705,027
Issue date
Apr 22, 2014
KLA-Tencor Corporation
Steven R. Lange
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED...
Publication number
20120113416
Publication date
May 10, 2012
KLA-Tencor Corporation
Steven R. Lange
G01 - MEASURING TESTING