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Stephane P. Durant
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Optical imaging system with laser droplet plasma illuminator
Patent number
8,575,576
Issue date
Nov 5, 2013
KLA-Tencor Corporation
Richard W. Solarz
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
OPTICAL IMAGING SYSTEM WITH LASER DROPLET PLASMA ILLUMINATOR
Publication number
20120205546
Publication date
Aug 16, 2012
KLA-Tencor Corporation
Richard W. Solarz
G01 - MEASURING TESTING