Stephen Bart

Person

Newton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Humidity correction method in thermistor based gas sensing platform
- Patent number 11,162,928
- Issue date Nov 2, 2021
- Invensense, Inc.
- Nishit Goel
- G01 - MEASURING TESTING
Information Patent Grant
Pressure sensor with real time health monitoring and compensation
- Patent number 10,458,870
- Issue date Oct 29, 2019
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined bulk acoustic wave resonator pressure sensor
- Patent number 10,352,800
- Issue date Jul 16, 2019
- MKS Instruments, Inc.
- Srinivas Tadigadapa
- G01 - MEASURING TESTING
Information Patent Grant
MEMS pressure sensors with integrated baffles
- Patent number 10,107,315
- Issue date Oct 23, 2018
- MKS Instruments, Inc.
- Lei Gu
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Stress relief MEMS structure and package
- Patent number 9,850,123
- Issue date Dec 26, 2017
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with real time health monitoring and compensation
- Patent number 9,562,820
- Issue date Feb 7, 2017
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Grant
Stress relief MEMS structure and package
- Patent number 9,499,393
- Issue date Nov 22, 2016
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-Pirani vacuum gauges
- Patent number 9,335,231
- Issue date May 10, 2016
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with separate actuator and sense fingers
- Patent number RE36498
- Issue date Jan 18, 2000
- Analog Devices
- Roger T. Howe
- 073 - Measuring and testing
Information Patent Grant
Method of making a sub-ground plane for a micromachined device
- Patent number 5,879,963
- Issue date Mar 9, 1999
- Analog Devices, Inc.
- Roger T. Howe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sub-ground plane for micromachined device
- Patent number 5,639,542
- Issue date Jun 17, 1997
- Analog Devices, Inc.
- Roger T. Howe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with separate actuator and sense fingers
- Patent number 5,565,625
- Issue date Oct 15, 1996
- Analog Devices, Inc.
- Roger T. Howe
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
HUMIDITY CORRECTION METHOD IN THERMISTOR BASED GAS SENSING PLATFORM
- Publication number 20210132014
- Publication date May 6, 2021
- InvenSense, Inc.
- Nishit Goel
- G01 - MEASURING TESTING
Information Patent Application
Micromachined Bulk Acoustic Wave Resonator Pressure Sensor
- Publication number 20170350779
- Publication date Dec 7, 2017
- MKS Instruments, Inc.
- Srinivas Tadigadapa
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE SENSOR WITH REAL TIME HEALTH MONITORING AND COMPENSATION
- Publication number 20170074742
- Publication date Mar 16, 2017
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Application
STRESS RELIEF MEMS STRUCTURE AND PACKAGE
- Publication number 20170036906
- Publication date Feb 9, 2017
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS RELIEF MEMS STRUCTURE AND PACKAGE
- Publication number 20160229688
- Publication date Aug 11, 2016
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Pirani Vacuum Gauges
- Publication number 20150276536
- Publication date Oct 1, 2015
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Application
MEMS PRESSURE SENSORS WITH INTEGRATED BAFFLES
- Publication number 20140318656
- Publication date Oct 30, 2014
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING
Information Patent Application
SELF-CALIBRATING PRESSURE SENSOR SYSTEM WITH PRESSURE SENSOR AND RE...
- Publication number 20140298884
- Publication date Oct 9, 2014
- MKS Instruments, Inc.
- Leonid Mindlin
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE SENSOR WITH INTEGRATED HEALTH MONITORING AND COMPENSATION
- Publication number 20140238103
- Publication date Aug 28, 2014
- MKS Instruments, Inc.
- Lei Gu
- G01 - MEASURING TESTING

Stephen Bart

Person

Patents Grantslast 30 patents

Humidity correction method in thermistor based gas sensing platform

Pressure sensor with real time health monitoring and compensation

Micromachined bulk acoustic wave resonator pressure sensor

MEMS pressure sensors with integrated baffles

Stress relief MEMS structure and package

Pressure sensor with real time health monitoring and compensation

Stress relief MEMS structure and package

Micro-Pirani vacuum gauges

Sensor with separate actuator and sense fingers

Method of making a sub-ground plane for a micromachined device

Sub-ground plane for micromachined device

Sensor with separate actuator and sense fingers

Patents Applicationslast 30 patents

HUMIDITY CORRECTION METHOD IN THERMISTOR BASED GAS SENSING PLATFORM

Micromachined Bulk Acoustic Wave Resonator Pressure Sensor

PRESSURE SENSOR WITH REAL TIME HEALTH MONITORING AND COMPENSATION

STRESS RELIEF MEMS STRUCTURE AND PACKAGE

STRESS RELIEF MEMS STRUCTURE AND PACKAGE

Micro-Pirani Vacuum Gauges

MEMS PRESSURE SENSORS WITH INTEGRATED BAFFLES

SELF-CALIBRATING PRESSURE SENSOR SYSTEM WITH PRESSURE SENSOR AND RE...

PRESSURE SENSOR WITH INTEGRATED HEALTH MONITORING AND COMPENSATION